S01600 - SEMI S16 - 半導體製造設備壽命終了階段減少環境衝擊的設計基準 Lang-Japanese Equipment Communications Standard (SECS-I)

Equipment Communications Standard (SECS-I)

本テストの目的は，高純度ガスシステムでの使用を意図したマスフローコントローラにより，パーティクル発生を測定することである。

and the environment) associated with the equipment

SEMI MF1617-0304 (Reapproved 0322)

It is not practical to consider every impurity or contaminant that might be present

S01600 - SEMI S16 - 半導體製造設備壽命終了階段減少環境衝擊的設計基準 Lang-Japanese Equipment Communications Standard (SECS-I)2006112120072www. semi. org320006 2007 SME SME SME Referenced SEMI Standards SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S12 Guidelines for Equipment Decontamination SEMI S13 Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment